Qualtity Monitoring and Predicitve Modelling
Semitec develops methods for monitoring and control of CMP processes. Through the analysis of measurement data and the correlation with material properties from consumables and relevant process parameters, it is possible to predict important quality parameter of the CMP process. With these predictive models, it is possible to establish early warning systems and thereby save costs and resources.
The prediction models are developed within the project ARAMID which is founded by the European Union. The other founding project partners alongside Semitec are Bosch Sensortec, Globalfoundries Dresden, Frauenhofer IKTS and Frauenhofer EAS/EES.